Abstract

Mini Review

Texture of Thin Films of Aluminum Nitride Produced by Magnetron Sputtering

Strunin Vladimir Ivanovich, Baranova Larisa Vasilievna* and Baisova Bibigul Tulegenovna

Published: 29 January, 2025 | Volume 8 - Issue 1 | Pages: 013-016

The results of the study of the texture of thin films of aluminum nitride obtained by magnetron sputtering are presented. The dependence of the sizes and degree of preferential orientation of crystallites on the conditions of formation of thin films (pressure, discharge power, composition of the plasma-forming gas) is investigated.

Read Full Article HTML DOI: 10.29328/journal.ijpra.1001106 Cite this Article Read Full Article PDF

Keywords:

Aluminum nitride films; Magnetron sputtering; Texture; Coherent scattering region size

References

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